CRT-M1600多功能溅射蒸发镀膜机
产品规格:
1.真空室:Φ1600*H1100mm,Φ1200*H1000mm
2.较大可镀工件:W210*L950mm,W175*L850mm
3.极限真空度:优于2*10-4Pa
4.抽气时间:大气压~8*10-4Pa小于30min
5.蒸发源:电阻式蒸发电极,一组
6.溅射源:孪生旋转阴极或孪生平面阴极,四组
7.离子源:线性离子源辅助沉积系统,一套
8.开启方式:正面铰链开门结构
9.真空系统:机械泵+分子泵,机械泵+罗茨泵
10.样品加热:铠装加热管预留
技术特点:
1.本设备主要用于沉积多层光学膜,如可见光分光膜、可见光滤光片、可见光抗反射膜、紫外截至滤光片、红外滤光片、激光抗反膜、激光反射膜和激光抗损膜等。
2.本设备适合企业、科研单位和高校使用。
3.该设备由真空室、真空机组、镀膜系统、工装系统和电气控制系统组成。
4.采用分子泵+机械泵作为高真空和工艺抽气;采用罗茨泵+机械泵作为前级抽气。
CRT-M1600 Multi-function Coating System
Specification:
1. Chamber: Φ1600*H1100mm,Φ1200*H1000mm
2. Maxmium sample dimension: 210*850mm,175*850mm
3. Ultimate pressure: Less than 2*10-4Pa
4. Pump Time: ATM.~8*10-4Pa less than 30min
5. Evaporator: Resistance Heating Evaporation
6. Sputtering: Twin Rotating Twin Plane Cathode
7. Ion Source: linear Ion Source
8. Door: Front door structure
9. Pump: Mechanical pump + Turbo Molecular Pump
10. Heater: Stainless Steel Heating Tube
Technical Features:
1. It is used to deposite mulfi-layer optical films, such as beam splitter, optical filter, antireflective film reflective film.
2. It is suitable for small enterprises, scientific research units universities.
3. The device consists of a vacuum chamber, vacuum unit, coating system, frock clamp electrical system.
4. The Vacuum Chamber is Pumped by molecules rotary vane pump, roots pump mechanical pump.