CRT-M1600多功能溅射蒸发镀膜机

产品规格:

1.真空室：Φ1600*H1100mm，Φ1200*H1000mm

2.较大可镀工件：W210*L950mm，W175*L850mm

3.极限真空度：优于2*10-4Pa

4.抽气时间：大气压~8*10-4Pa小于30min

5.蒸发源：电阻式蒸发电极，一组

6.溅射源：孪生旋转阴极或孪生平面阴极，四组

7.离子源：线性离子源辅助沉积系统，一套

8.开启方式：正面铰链开门结构

9.真空系统：机械泵+分子泵,机械泵+罗茨泵

10.样品加热：铠装加热管预留

技术特点：

1.本设备主要用于沉积多层光学膜，如可见光分光膜、可见光滤光片、可见光抗反射膜、紫外截至滤光片、红外滤光片、激光抗反膜、激光反射膜和激光抗损膜等。

2.本设备适合企业、科研单位和高校使用。

3.该设备由真空室、真空机组、镀膜系统、工装系统和电气控制系统组成。

4.采用分子泵+机械泵作为高真空和工艺抽气；采用罗茨泵+机械泵作为前级抽气。

CRT-M1600 Multi-function Coating System

Specification:

1. Chamber: Φ1600*H1100mm，Φ1200*H1000mm

2. Maxmium sample dimension: 210*850mm，175*850mm

3. Ultimate pressure: Less than 2*10-4Pa

4. Pump Time: ATM.~8*10-4Pa less than 30min

5. Evaporator: Resistance Heating Evaporation

6. Sputtering: Twin Rotating  Twin Plane Cathode

7. Ion Source: linear Ion Source

8. Door: Front door structure

9. Pump: Mechanical pump + Turbo Molecular Pump 

10. Heater: Stainless Steel Heating Tube

Technical Features:

1. It is used to deposite mulfi-layer optical films, such as beam splitter, optical filter, antireflective film  reflective film. 

2. It is suitable for small enterprises, scientific research units  universities. 

3. The device consists of a vacuum chamber, vacuum unit, coating system, frock clamp  electrical system.

4. The Vacuum Chamber is Pumped by molecules rotary vane pump, roots pump  mechanical pump.