CRT-H300连续中试实验线

产品规格:

1.真空室：W450*L4000*H1000mm

2.Z 大可镀工件直径：2*300*300mm

3.极限真空度：优于6*10-4Pa

4.抽气时间：大气压~6*10-3Pa小于3h

5.工作真空：1*10-1Pa~101Pa

6.阴极尺寸：80*420mm

7.真空系统：机械泵+罗茨泵+分子泵

8.样品加热：铠装加热管（Z 高温度500℃）

CRT-H300 Pilot  Inline Coating System

Specification:

1. Vacuum Chamber: W450*L4000*H1000mm

2. Workpiece Dimension: 2pcs*300*300mm

3. Ultimate Pressure: 6*10-4Pa

4. Pump Time: ATM.~6*10-3Pa less than 3h 

5. Working Pressure:  1*10-1Pa ~101Pa

6. Cathode : Flat Cathode with size of 80*420mm

7. Pump: Mechanical pump + Roots Pump + Turbo Molecular Pump 

8. Heater: Stainless Steel Heating Tube (Tmax=500 ℃ )

技术特点：

1.本实验线为立式磁控溅射实验镀膜线，有四室结构，为进片室，过渡室1，镀膜室，过渡室2；镀膜室内有一对（两个）平面阴极靶；

2.内部采用不锈钢铠装加热器，并有四层镜面板进行保温以获得稳定均匀的温度场；

3.本实验线为可以完成AZO镀膜、CIG镀膜、ZnO镀膜，配合退火炉完成CIGS全套实验。

4.特别适合小型企业、科研单位和高校使用。

Technical Features:

1.This Pilot Inline  consists of four Vacuum chambers, such as inlet chamber, transition chamber 1 with a linear ion source, transition chamber 2  the coating chamber with a twin flat cathode. 

2. The Stainless Steel Heating Tubes with four mirror panels in the Chamber provide the stable temperature field. 

3. The machine can sputter AZO coating, CIG coating  ZnO coating for CIGS cell Process.

4. It is suitable for small enterprises, scientific research units  universities.